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Etching Equipment×アールエムテック - List of Manufacturers, Suppliers, Companies and Products

Etching Equipment Product List

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[Demo in Progress!] Small Experimental Ion Beam Etching Device

[Demo in Progress!] Small Experimental Ion Beam Etching Device

[Demo in progress!] Experimental device equipped with an ion source that can be customized to meet usage needs.

The "Small Experimental Ion Beam Etching Device" uses a DC ion source and is equipped with a substrate rotation cooling single stage. It easily etches materials such as Au, Pt, and magnetic materials, and taper processing can also be done easily. Processing is possible at a substrate surface temperature of 80°C or lower. It is ideal for microfabrication. 【Features】 ● No toxic gases are used, so exhaust gas treatment is unnecessary ● Endpoint detector can be installed ● For inquiries or questions about ion beam etching devices, ion sources, and ion beam technology, please feel free to consult us. For more details, please download the catalog or contact us.

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Small Ion Beam Etching Device

Small Ion Beam Etching Device

This is an ion beam etching device that uses an ion source to irradiate the target material with an ion beam and perform dry etching.

The small ion beam etching device uses a DC ion source and is an ion beam etching (IBE) device equipped with a substrate rotation cooling single stage. It is capable of etching fine patterns, as well as metal and magnetic materials. 【Features】 ○ Easily etches Au, Pt, magnetic materials, etc. ○ Taper processing is easy ○ Processing is possible at substrate surface temperatures below 80°C ○ No toxic gases are used, so exhaust gas treatment is unnecessary ○ Can be equipped with an endpoint detector For more details, please contact us or download the catalog.

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